High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Manufacturer | Side-by-Side Classsics LLC |
| Binding | Paperback |
| EANs | 9781963622065 |
| ReleaseDate | 0000-00-00 |