High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Prestel |
| Manufacturer | Prestel Junior |
| Binding | Hardcover |
| ItemPartNumber | 9783791372310 |
| Color | Navy |
| ReleaseDate | 2016-11-21 |
| UnitCount | 1 |
| Format | Pop up |
| EANs | 9783791372310 |