High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Oxford University Press, USA |
| Manufacturer | Oxford University Press |
| Binding | Hardcover |
| ItemPartNumber | 9780198796701 |
| UnitCount | 1 |
| EANs | 9780198796701 |
| ReleaseDate | 0000-00-00 |