High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | W. W. Norton & Company |
| Manufacturer | W W Norton & Co Inc |
| Binding | Paperback |
| ItemPartNumber | 9781324062318 |
| ReleaseDate | 2024-07-01 |
| UnitCount | 1 |
| EANs | 9781324062318 |