High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Springer |
| Manufacturer | Springer |
| Binding | Paperback |
| ItemPartNumber | Refer to Sapnet. |
| ReleaseDate | 2007-08-02 |
| UnitCount | 1 |
| Format | Illustrated |
| EANs | 9780387728988 |