High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Manufacturer | Unicorn Publishing Group |
| Binding | Hardcover |
| ReleaseDate | 2022-08-05 |
| UnitCount | 1 |
| EANs | 9781914414466 |