High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Princeton University Press |
| Manufacturer | Princeton University Press |
| Binding | Hardcover |
| ReleaseDate | 2025-11-25 |
| UnitCount | 1 |
| EANs | 9780691177229 |