High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Manufacturer | GSN |
| Binding | Hardcover |
| ItemPartNumber | 43243-49541 |
| UnitCount | 1 |
| EANs | 9780991178216 |
| ReleaseDate | 0000-00-00 |