High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | MMPBooks |
| Manufacturer | MMPBooks |
| Binding | Paperback |
| UnitCount | 1 |
| EANs | 9788365958976 |
| ReleaseDate | 2021-07-07 |