High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Dover Publications |
| Manufacturer | Dover Publications |
| Binding | Paperback |
| ItemPartNumber | 39ill. |
| ReleaseDate | 1996-02-09 |
| UnitCount | 1 |
| UPCs | 800759688890 |
| EANs | 9780486688893 |