High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Firefly Books Ltd |
| Manufacturer | Firefly Books |
| Binding | Paperback |
| ItemPartNumber | FBA-|279065 |
| UnitCount | 1 |
| Format | Picture Book |
| EANs | 9781552092293 |
| ReleaseDate | 0000-00-00 |