High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Aster |
| Manufacturer | Aster |
| Binding | Paperback |
| ReleaseDate | 2020-09-22 |
| UnitCount | 1 |
| EANs | 9781783253418 |