High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | CREATESPACE |
| Manufacturer | Createspace Independent Pub |
| Binding | Paperback |
| EANs | 9781523824472 |
| ReleaseDate | 0000-00-00 |