High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Fulcrum Publishing |
| Manufacturer | Fulcrum Publishing |
| Binding | Paperback |
| ItemPartNumber | RKC2008489865 |
| UnitCount | 1 |
| UPCs | 757739035635 |
| EANs | 9781555913564 |
| ReleaseDate | 0000-00-00 |