High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Watson-Guptill |
| Manufacturer | Watson-Guptill |
| Binding | Hardcover |
| ItemPartNumber | 9780823007622 |
| Color | Multicolor |
| ReleaseDate | 1991-02-01 |
| UnitCount | 1 |
| EANs | 9780823007622 |