High-NA EUV Imaging and Mask 3D Effects: 0.55 NA anamorphic optics, reflective reticle, absorber shadowing, telecentricity error, Bossung tilt, ... Python (Computational Mathematics Library)
| Country | USA |
| Brand | Publications International, Ltd. |
| Manufacturer | Publications International, Ltd. |
| Binding | Hardcover |
| ReleaseDate | 2023-05-30 |
| UnitCount | 1 |
| EANs | 9781639382927 |